Miniature high vacuum tube made from high-purity quartz tube furnace to heat the reaction chamber, the maximum temperature up to 1200 ℃, you can add a variety of inert gas, to meet the requirements of most CVD experiments, the system is research institutes, universities for material The device is an ideal choice for study by a small vacuum tube furnace and turbo molecular pump components, the main components of molecular pumps are: pre-mechanical pump, cut off the release valve, foreline, molecular pump power, control power supply assembly in Clean the rack made of ultra-high vacuum equipment. Easy installation, simple operation, easy connection, reliable performance, and can be widely used for surface analysis, manufacturing and vacuum technology in all areas of accelerator technology, semiconductor equipment, plasma technology, vacuum devices; small vacuum tube made from high-purity quartz tube furnace heating the reaction chamber, the maximum temperature up to 1200 ℃, you can add a variety of inert gas, to meet the requirements of most CVD experiments, the system is research institutes, universities ideal material for research. Technical Specifications Product Name high vacuum micro-tube furnace Model CY-O1200-50ICS-HTV operating temperature ≦ 1200 ℃ Temperature Accuracy ± 1 ℃ temperature mode multi-stage programmable control material purity quartz tube furnace tube diameter 50mm tube length 700mm 200mm thermostatic heating zone Mayor 100mm Stainless steel vacuum sealing flange connecting pipes KF25 high vacuum bellows vacuum vacuum gauge measuring digital composite air inlet flange DN100LF pumping rate L / S (air)> 110 compression ratio N2 H2> 108 5 × 102 extreme pressure (Pa) 6 × 10-6 vent flange bearings precision mechanical bearings KF25 use input voltage frequency (V / Hz) 220 ± 20/50 Ambient temperature (℃) 0 ~ 40 preamp Pump Model RVP-4 start time (min) <3 Rated working revolutions (rpm) 42,300 Cooling Water cooled installation can be any weight (kg) 115 length × width × height 500 × 510 × 985 Power supply AC: 220V 50Hz Total power 2.5KW